Pulsed plasmas study of linear antennas microwave CVD system for nanocrystalline diamond film growth

0381169 - FZÚ 2013 RIV US eng J - Článek v odborném periodiku
Vlček, J. - Fendrych, František - Taylor, Andrew - Novotný, Michal - Liehr, M.
Pulsed plasmas study of linear antennas microwave CVD system for nanocrystalline diamond film growth.
Journal of Materials Research. Roč. 27, č. 5 (2012), s. 863-867. ISSN 0884-2914. E-ISSN 2044-5326
Grant CEP: GA AV ČR KAN200100801; GA AV ČR KAN300100801; GA AV ČR KAN301370701; GA MŠMT(CZ) LD11076
GRANT EU: European Commission(XE) 238201 - MATCON
Výzkumný záměr: CEZ:AV0Z10100520
Klíčová slova: plasma-enhanced chemical vapor deposition * diamond * optical properties
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.713, rok: 2012

Optical emission spectroscopy (OES) was used to study plasmas generated by a novel plasma-enhanced linear antennas microwave chemical vapor deposition system for nanocrystalline diamond (NCD) growth in gas mixtures of H2 + CH4 + CO2. Atomic hydrogen intensities were investigated for pulsed plasmas and continuous wave (CW) mode plasmas. OES was used to study the effect of pressure (0.38–2 mbar), microwave pulse frequency (3.8–25 kHz), and total gas flow (125–1000 sccm). By using the Boltzmann plot for atomic hydrogen line intensities, plasma electron temperatures for pulsed and CW plasmas were calculated. During experiments, NCD films were deposited, which were investigated by secondary electron microscopy and Raman spectroscopy in terms of surface crystalline morphology and nondiamond carbon content. NCD films produced in high pulse frequency plasmas show low sp2 content (less than 5%) and homogenous crystalline structure with only a small amount of crystalline...
Trvalý link: http://hdl.handle.net/11104/0211698