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Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization

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    0374830 - FZÚ 2012 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
    Kromka, Alexander - Babchenko, Oleg - Ižák, Tibor - Potocký, Štěpán - Davydova, Marina - Neykova, Neda - Kozak, Halyna - Remeš, Zdeněk - Hruška, Karel - Rezek, Bohuslav
    Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization.
    NANOCON 2011. Conference proceedings. Ostrava: Tanger Ltd, 2011, s. 271-279. ISBN 978-80-87294-27-7.
    [NANOCON 2011. International Conference /3./. Brno (CZ), 21.09.2011-23.09.2011]
    Grant CEP: GA ČR(CZ) GAP108/11/0794; GA MŠk(CZ) MEB0810082; GA AV ČR KAN400100701; GA AV ČR(CZ) IAAX00100902
    Výzkumný záměr: CEZ:AV0Z10100521
    Klíčová slova: microwave plasma * CVD deposition * diamond * CNT * graphene
    Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

    A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area.
    Trvalý link: http://hdl.handle.net/11104/0207655

     
     
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