Interferometry with referencing of wavelength

0368391 - ÚPT 2012 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
Lazar, Josef - Číp, Ondřej - Čížek, Martin - Hrabina, Jan - Buchta, Zdeněk
Interferometry with referencing of wavelength.
International Conference on Applications of Optics and Photonics (Proceedings of SPIE Vol. 8001). Bellingham: SPIE, 2011, 80010X:1-6. ISBN 978-0-8194-8575-5.
[International Conference on Applications of Optics and Photonics. Braga (PT), 03.05.2011-07.05.2011]
Grant CEP: GA MPO 2A-1TP1/127; GA MŠMT(CZ) LC06007; GA ČR GA102/09/1276; GA ČR GPP102/11/P820; GA AV ČR KAN311610701; GA MPO FR-TI1/241; GA MPO FR-TI2/705
Výzkumný záměr: CEZ:AV0Z20650511
Klíčová slova: refractometry * nanopositioning * interferometry * nanometrology
Kód oboru RIV: BH - Optika, masery a lasery

In this contribution we present an approach to incremental interferometric measurements of displacements over a limited range where the atmospheric wavelength of the coherent laser source is either directly stabilized to a mechanical reference or is corrected to fit to the reference. The idea comes from the possibility to use a highly stable material for a reference frame, material which can perform thermal expansion coefficients on the level 10-8/K within a large temperature range up to 50K. Over a range of several K which may be the practical range for displacement measurements the coefficient is even smaller. This may outperform the best techniques of correction for the variations of the refractive index of air. The mechanics is always a part of the measurement setup and represents one of the sources of uncertainty. A link of the refractive to the mechanical reference can practically eliminate another source of uncertainty.
Trvalý link: http://hdl.handle.net/11104/0202750