0352428 - ÚPT 2011 SG eng A - Abstrakt
Neděla, Vilém - Konvalina, Ivo - Lencová, Bohumila - Zlámal, J.
Comparison of calculated, simulated and measured signal amplification in variable pressure SEM.
Eighth International Conference on Charged Particle Optics CPO-8. Singapore: National University of Singapore, 2010. s. 81-82.
[CPO /8./ International Conference on Charged Particle Optics. 12.07.2010-16.07.2010, Singapore]
Grant CEP: GA ČR GAP102/10/1410
Výzkumný záměr: CEZ:AV0Z20650511
Klíčová slova: SEM * variable pressure SEM * AQUASEM * EOD * YAG-BSE detector
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

High pressure of gas or mostly water vapour, with pressure range from 0.1 Pa to 80 Pa in the first differentially pumped chamber and 10 Pa to over 2000 Pa in the specimen chamber is used in variable pressure scanning electron microscopes (VP-SEM) such as our experimental AQUASEM II equipped with a combined YAG-BSE and ionization detector of SE, see Figure 1. The gas environment causes unwanted primary electron beam diffusion, but it also supports gas ionization cascade amplification of the signal of secondary electrons (SE), accelerated by the applied field of detection electrode of the ionisation detector.
Trvalý link: http://hdl.handle.net/11104/0191935