Metrological SPM with positioning controlled by green light interferometry

0335626 - ÚPT 2010 RIV DE eng C - Konferenční příspěvek (zahraniční konf.)
Lazar, Josef - Klapetek, P. - Číp, Ondřej - Čížek, Martin - Hrabina, Jan - Šerý, Mojmír
Metrological SPM with positioning controlled by green light interferometry.
Fringe 2009 - 6th International Workshop on Advanced Optical Metrology. Heidelberg: Springer, 2009, s. 405-410. ISBN 978-3-642-03050-5.
[Fringe 2009 - International Workshop on Advanced Optical Metrology /6./. Nürtinger (DE), 13.09.2009-16.09.2009]
Grant CEP: GA MŠMT(CZ) LC06007; GA MŠMT 2C06012; GA MPO 2A-1TP1/127; GA MPO FT-TA3/133; GA MPO 2A-3TP1/113; GA ČR GA102/09/1276; GA ČR GA102/07/1179
Výzkumný záměr: CEZ:AV0Z20650511
Klíčová slova: laser interferometry * Nd:YAG laser
Kód oboru RIV: BH - Optika, masery a lasery

Laser interferometry seems to be a solution not only due to its direct traceability to the fundamental etalon of length but also the incremental interferometer in its fringe counting mode gives an excellent dynamic range limited only by the fluctuations of the refractive index of air and offers nanometer or even subnanometer resolution over large range. We concentrated onto a small range flexture three-axis nanopositioning stage equipped with closed-loop motion control with capacitive sensors embedded in a frame with six-axes interferometric system supplied from a stabilized single-frequency frequency doubled 532 nm Nd:YAG laser.
Trvalý link: http://hdl.handle.net/11104/0180037