0304177 - URE-Y 20030035 RIV CZ eng C - Konferenční příspěvek (zahraniční konf.)
Franc, J. - Janda, Pavel - Novotný, Jan
Geometrical aspects of connection between surface reggedness and resistance of thin films.
Pilsen: University of West Bohemia, 2003. ISBN 80-7082-951-6. In: Applied Electronics 2003. - (Pinker, J.), s. 51-54
[Applied Electronics 2003. Pilsen (CZ), 10.09.2003-11.09.2003 (K)]
Grant CEP: GA AV ČR KSK1010104 Projekt 04/01:4046
Výzkumný záměr: CEZ:AV0Z2067918
Klíčová slova: optoelectronic devices * epitaxial layers * measurement
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus

The relationship between the ruggedness of substrate surface and the resistance of sputtered NiCr films was studied. The geometrical model in which the surface unevenness is simulated by pyramid was derived. The increase of R/ on a rugged surface in comparison with a polished one was calculated. Ruggedness on real surfaces was analysed by means of AFM microscopy. Obtained data were compared with the model.
Trvalý link: http://hdl.handle.net/11104/0114318