Advances in Imaging and Electron Physics

0205556 - UPT-D 20020106 RIV US eng M - Část monografie knihy
Frank, Luděk
Advances in scanning electron microscopy.
Advances in Imaging and Electron Physics., s. 327 - 373
Grant CEP: GA ČR GA202/99/0008
Výzkumný záměr: CEZ:AV0Z2065902
Klíčová slova: scanning electron microscopy * electron optics * instrumens for study of surfaces
Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika

The monograph defines a configuration, construction and electron optical parameters of a standard scanning electron microscope and it defines and analyses new principals and approaches towards this standard. All aspects of the device are dealt with including the detection system, mechanization of the construction, vacuum and control electronics. The attention is devoted to new trends, which are: microscopy at higher pressure, microscopy byvery slow electrons and multi-channel signal detection.
Trvalý link: http://hdl.handle.net/11104/0101169