0134622 - FZU-D 20030522 RIV US eng C - Konferenční příspěvek (zahraniční konf.)
Boody, F. P. - Kempf, J. - Höpfl, R. - Hora, H. - Rohlena, Karel - Krása, Josef - Pfeifer, Miroslav - Woryna, E. - Wolowski, J. - Peřina, Vratislav
The laser ion implantation facility (LIIF): Design & First Results.
Proceedings on Lasers and Electro-Optics, CLEO 2000. Washington: XX, 2000, s. x-x.
[Lasers and Electro-Optics, CLEO 2000. San Francisco (US), 07.05.2000-12.05.2000]
Grant CEP: GA MŠMT LN00A100
Výzkumný záměr: CEZ:AV0Z1048901; CEZ:AV0Z1010921
Klíčová slova: laser ion implantation
Kód oboru RIV: BH - Optika, masery a lasery

The laser ion implantation facility has been designed to study the commercial feasibility of laser ion implantation using an industrial excimer laser. Design details and first results of characterizing the ion source and implanting ions will be presented.
Trvalý link: http://hdl.handle.net/11104/0032518