0134428 - FZU-D 20030328 RIV NL eng J - Článek v odborném periodiku
Churpita, Olexandr - Hubička, Zdeněk - Čada, Martin - Chvostová, Dagmar - Soukup, Ladislav - Jastrabík, Lubomír - Ptáček, Pavel
Deposition of In_xO_y and SnO_x thin films on polymer substrate by means of atmospheric barrier-torch discharge.
Surface and Coatings Technology. 174-175, - (2003), s. 1059-1063. ISSN 0257-8972. E-ISSN 1879-3347
Grant CEP: GA MŠMT LN00A015; GA AV ČR IBS1010203
Výzkumný záměr: CEZ:AV0Z1010921
Klíčová slova: atmospheric barrier-torch * In_xO_y and SnO_x * thin films * electrical conductivity
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.410, rok: 2003

Barrier torch discharge was used for low temperature deposition of In_xO_y and SnO_x thin films at atmospheric substrates. Vaoirs of Sn- and In-acetylacetonat were used as growth precursors for the deposition process of SnO_x and In_xO_y thin films. Transparent films of conductivity ĺ_SnO÷10S/cm for SnO_x and ĺ_InO÷10² S/cm for In_xO_y were deposited on polymer substrates under conditions when the atmospheric plasma jet directly interacted with the polymer substrate.
Trvalý link: http://hdl.handle.net/11104/0032331