Počet záznamů: 1  

CN.sub.x./sub. coatings deposited by pulsored RF supersonic plasma jet: hardness, nitrogenation and optical properties

  1. 1. 0133425 - FZU-D 20010277 RIV NL eng J - Článek v odborném periodiku
    Hubička, Zdeněk - Šícha, Miloš - Pajasová, Libuše - Soukup, Ladislav - Jastrabík, Lubomír - Chvostová, Dagmar - Wagner, T.
    CNx coatings deposited by pulsored RF supersonic plasma jet: hardness, nitrogenation and optical properties.
    Surface and Coatings Technology. 142-144, - (2001), s. 681-687 ISSN 0257-8972
    Grant CEP: GA ČR GA202/00/1592; GA MŠk LN00A015
    Výzkumný záměr: CEZ:AV0Z1010914
    Klíčová slova: carbon nitrides * plasma-chemical deposition * tribology * optical properties
    Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
    Impakt faktor: 1.236, rok: 2001

    A low pressure pulsed RF supersonic plasma jet system (RPJ) has been used for deposition of CNx thin films. The aim of the CNx thin films deposition was an application for tribological coatings. Chemical composition, mechanical and optical properties of deposited CNx films have been measured. The mechanism of CNx formation has been studied as well.
    Trvalý link: http://hdl.handle.net/11104/0031394