0133370 - FZU-D 20010165 RIV CH eng J - Článek v odborném periodiku
Kulikovsky, V. - Boháč, Petr - Franc, František - Deineka, Alexander - Vorlíček, Vladimír - Jastrabík, Lubomír
Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering.
Diamond and Related Materials. Roč. 10, - (2001), s. 1076-1081. ISSN 0925-9635. E-ISSN 1879-0062
Grant CEP: GA ČR GA202/00/1592; GA MŠMT ME 305
Výzkumný záměr: CEZ:A02/98:Z1-010-914
Klíčová slova: diamond-like carbon * structure * stress * hardness
Kód oboru RIV: BM - Fyzika pevných látek a magnetismus
Impakt faktor: 1.902, rok: 2001

In this paper the authors attempts to find the connection between the hardness, internal stress, resistivity and structure of a-C films obtained ba magnetron sputtering of carbon by varying the Ar pressure, the substrate bias and gas mixtures of Ar+CH4 or Ar+O2.
Trvalý link: http://hdl.handle.net/11104/0031342