0132088 - FZU-D 980342 RIV US eng J - Článek v odborném periodiku
Musil, Jindřich - Mišina, Martin - Hovorka, D.
Planar magnetron sputtering discharge enhanced with radio frquency or microwave magnetoactive plasma.
Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. Roč. 15, č. 4 (1997), s. 1999-2006. ISSN 0734-2101. E-ISSN 1520-8559
Grant CEP: GA ČR GV106/96/K245
Impakt faktor: 1.576, rok: 1997
Trvalý link: http://hdl.handle.net/11104/0030126