Počet záznamů: 1
Energy distribution of ions in an unbalanced magnetron plasma measured with energy-resolved mass spectrometry
- 1.0132084 - FZU-D 980338 RIV CH eng J - Článek v odborném periodiku
Kadlec, Stanislav - Quaeyhaegens, C. - Knuyt, G. - Stals, L. M.
Energy distribution of ions in an unbalanced magnetron plasma measured with energy-resolved mass spectrometry.
Surface and Coatings Technology. Roč. 89, - (1997), s. 177-184. ISSN 0257-8972. E-ISSN 1879-3347
Impakt faktor: 0.892, rok: 1997
Trvalý link: http://hdl.handle.net/11104/0030122
Počet záznamů: 1