Počet záznamů: 1
The hydrogen plasma doping of nanocrystalline ZnO thin flms
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SYSNO ASEP 0483629 Druh ASEP A - Abstrakt Zařazení RIV O - Ostatní Název The hydrogen plasma doping of nanocrystalline ZnO thin flms Tvůrce(i) Chang, Yu-Ying (FZU-D)
Remeš, Zdeněk (FZU-D) RID, ORCID
Stuchlík, Jiří (FZU-D) RID, ORCIDCelkový počet autorů 3 Zdroj.dok. E-MRS 2017 Spring Meeting and Exhibit. - Strasbourg : European Materials Research Society, 2017 Poč.str. 1 s. Forma vydání Online - E Akce E-MRS 2017 Spring Meeting and Exhibit Datum konání 22.05.2017 - 26.05.2017 Místo konání Strasbourg Země FR - Francie Typ akce WRD Jazyk dok. eng - angličtina Země vyd. FR - Francie Klíč. slova ZnO ; magnetron sputtering ; hydrogen ; doping Vědní obor RIV BM - Fyzika pevných látek a magnetismus Obor OECD Condensed matter physics (including formerly solid state physics, supercond.) CEP GC16-10429J GA ČR - Grantová agentura ČR Institucionální podpora FZU-D - RVO:68378271 Anotace We study the effect on the optical and electrical properties of hydrogen plasma treatment of the nominally undoped, nanocrystalline ZnO thin films deposited by DC reactive magnetron sputtering of Zn target in the gas mixture of argon and oxygen plasma. After hydrogen plasma treatment, the increase of the electrical conductivity and the increase of the infrared optical absorption was detected and related to the increase of the free carrier concentration. To confirm this relation, the mobility and carrier concentration were measured by temperature dependent electrical resistivity and Hall effect using the van der Pauw method. We also investigated the localized defect states below the optical absorption edge using optical absorption spectroscopy and photoluminescence in a broad spectral range from near UV to near IR. We conclude that the increase of the electrical conductivity is indeed confirmed to be related to the increase of the free carrier concentration. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2018
Počet záznamů: 1