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Direct measurements of the ion flux at the substrate in reactive HiPIMS
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SYSNO ASEP 0464208 Druh ASEP A - Abstrakt Zařazení RIV O - Ostatní Název Direct measurements of the ion flux at the substrate in reactive HiPIMS Tvůrce(i) Čada, Martin (FZU-D) RID, ORCID, SAI
Lundin, D. (FR)
Hubička, Zdeněk (FZU-D) RID, ORCID, SAIZdroj.dok. International Conference on Plasma Surface Engineering. Abstracts. ( PSE 2016 ) /15./. - Braunschweig : European Joint Committee on Plasma and Ion Surface Engineering (EJC / PISE), 2016
S. 415-415Poč.str. 1 s. Forma vydání Online - E Akce International Conference on Plasma Surface Engineering ( PSE 2016 ) Datum konání 12.09.2016 - 16.09.2016 Místo konání Garmisch-Partenkirchen Země DE - Německo Typ akce WRD Jazyk dok. eng - angličtina Země vyd. DE - Německo Klíč. slova HiPIMS ; impedance ; ion flux ; reactive sputtering Vědní obor RIV BL - Fyzika plazmatu a výboje v plynech CEP GA15-00863S GA ČR - Grantová agentura ČR TA03010743 GA TA ČR - Technologická agentura ČR Institucionální podpora FZU-D - RVO:68378271 Anotace A direct measurement of the ion flux impinging on the substrate during ionized physical vapour deposition is valuable input when optimizing thin film deposition processes such as High-Power Impulse magnetron sputtering. However, these measurements are often complicated by the fact that they require expensive diagnostic equipment. For that reason an innovative approach consisting of an extension of a quartz crystal microbalance (QCM) sensor has been investigated in the present contribution. On top of deposition rate, the modified QCM is able to measure ionized fraction of depositing particles and ion flux on the substrate. Recently reported results proved that magnets placed at the top of the QCM sensor are able to significantly reduce electron current on the positively biased electrode attached to the crystal and in this way measure only the deposition rate of neutral particles. Pracoviště Fyzikální ústav Kontakt Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Rok sběru 2017
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